Plano mirrors are used, for example, in fast beam steering systems for laser material processing or in free space communication. The surface quality of flat mirrors plays an essential role, as deviations from the target surface shape lead to unwanted beam deflection and loss of optical power.
The identification of defective mirrors is accomplished through the utilisation of wavefront-based topography measurement in a reflected-light configuration. The measurement of surface flatness and reflected wavefront error is also employed for the identification and monitoring of trends in the production process. The benefits of this method include contact-free testing with high intrinsic stability of 2nm RMS, as well as rapid data evaluation with wavefront reconstruction rates of 10Hz and higher.
In addition to plano mirrors, spherical and aspherical mirrors can also be measured.
Our solution for wavefront measurement of mirrors
The SHSInspect RL module measures the surface shape deviation of plano mirrors, spherical and aspherical mirrors with highest precision. Accuracies in the lambda/20 PVr range can be achieved.
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